Interference filter, optical filter device, optical module, electronic apparatus, manufacturing method of interference filter, and mems element

A manufacturing method of an interference filter which includes a first substrate;

• a second substrate that faces the first substrate;
• a first reflective film that is provided on the first substrate;
• a second reflective film that is provided on the second substrate and faces the first reflective film;
• a first electrode that is provided on the first substrate;
• and a second electrode that is provided on the second substrate, in which the first electrode is connected to a second electrode at a connection position, the method comprising:
• forming the first substrate, and forming the first electrode in a region of the first substrate which overlaps at least the connection position;
• forming a mask pattern which includes at least a first opening which overlaps the connection position of the second substrate when the second substrate faces the first substrate in a plan view in which the second substrate is viewed from a thickness direction, and a second opening which has a larger area than an area of the first opening in the plan view at a position different from a position of the first opening;
• connecting a first groove corresponding to the first opening to a second groove corresponding to the second opening through wet etching;
• forming the second electrode in a region of the second substrate which overlaps at least the connection position;
• and
• bringing the first electrode into contact with the second electrode at the connection position.

A MEMS element comprising:

• a first substrate;
• a second substrate that faces the first substrate;
• a first electrode that is provided on the first substrate;
• and
• a second electrode that is provided on the second substrate and is in contact with the first electrode at a connection position,
• wherein the second substrate includes
• a first groove that is provided at the connection position in a plan view in which the first substrate and the second substrate are viewed from a substrate thickness direction, and
• a second groove that has a larger area than an area of the first groove in the plan view and is connected to the first groove.