Systems and methods for measuring high-intensity light beams
AssigneeUltratech, Inc.
InventorsSergeui Anikitchev, David Gaines
Life of this patent
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Abstract
Systems and methods for measuring an intensity characteristic of a light beam are disclosed. The methods include directing the light beam into a prism assembly that includes a thin prism sandwiched by two transparent plates, and reflecting a portion of the light beam by total-internal-reflection surface to an integrating sphere while transmitting the remaining portion of the light beam through the two transparent plates to a beam dump. The method also includes detecting light captured by the integrating sphere and determining the intensity characteristic from the detected light.
Claims22
A method of measuring an intensity characteristic of a light beam, comprising:
- directing the light beam into a prism assembly that includes a thin prism sandwiched by two transparent plates, wherein the thin prism has a width d and a total-internal-reflecting (TIR) surface having an area;
- reflecting a portion of the light beam by the TIR surface to an integrating sphere while transmitting the remaining portion of the light beam through the two transparent plates to a beam dump;
- detecting a portion of the light captured by the integrating sphere;
- and
- determining an intensity characteristic of the light beam from the detected light.
A system for measuring an intensity characteristic of a light beam, comprising:
- a prism assembly arranged to receive the light beam at an input side, the prism assembly including a thin prism sandwiched by two transparent plates, wherein the thin prism has a width d and a total-internal-reflecting (TIR) surface, wherein the TIR surface reflects a portion of the light beam, thereby defining an unreflected portion of the light beam;
- an integrating sphere arranged adjacent a first output side of the prism assembly to receive the reflected portion of the light beam;
- a beam dump arranged adjacent a second output side of the prism assembly and arranged to receive the unreflected portion of the light beam;
- a photodetector operably arranged relative to the integrating sphere and adapted to measuring an amount of optical power received by the integrating sphere and generating an electrical detector signal representative of the measured amount of optical power;
- and
- a processor electrically connected to the photodetector and that includes instructions embodied in a computer-readable medium that cause the processor to determine the intensity characteristic of the reflected portion of the light beam.
Dependencies are inferred from the claim text.