Substrate holder and method of manufacturing a substrate holder
AssigneeASML Netherlands B.V.
InventorsRaymond Wilhelmus Louis Lafarre, Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg
Life of this patent
Estimating the term…
Abstract
An object holder (100) for a lithographic apparatus has a main body (400) having a surface (400a). A plurality of burls (406) to support an object are formed on the surface or in apertures of a thin-film stack (410, 440, 450). At least one of the burls is formed by laser-sintering. At least one of the burls formed by laser-sintering may be a repair of a damaged burl previously formed by laser-sintering or another method.
Claims20
A method of manufacturing an object holder for use in a lithographic apparatus, the method comprising:
- providing a main body having a flat surface;
- and
- forming a plurality of burls on the flat surface, the burls projecting from the flat surface and having end surfaces to support an object, wherein forming at least part of at least one of the burls comprises laser-sintering.
An object holder for use in a lithographic apparatus, the object holder comprising:
- a main body having a flat surface;
- and
- a plurality of burls provided on the surface and having end surfaces to support an object,
- wherein at least part of at least one of the burls has been formed by laser-sintering.
Dependencies are inferred from the claim text.