Fuel Stream Generator, Source Collector Apparatus and Lithographic Apparatus
AssigneeASML Netherlands B.V.
InventorsHendrikus Gijsbertus Schimmel, Dzmitry Labetski
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Abstract
A fuel stream generator comprising a nozzle connected to a fuel reservoir, wherein the nozzle is provided with a gas inlet configured to provide a sheath of gas around fuel flowing along the nozzle is disclosed. Also disclosed are a method of generating fuel droplets and a lithography apparatus incorporating the fuel stream generator.
Claims18
-17. (canceled)
A fuel stream generator comprising a nozzle connected to a fuel reservoir, wherein the nozzle has a gas inlet configured to provide a sheath of gas that constricts fuel flowing along the nozzle.
A source collector apparatus comprising:
- a fuel stream generator comprising a nozzle connected to a fuel reservoir, wherein the nozzle has a gas inlet configured to provide a sheath of gas that constricts fuel flowing along the nozzle;
- a plasma formation location arranged to receive fuel droplets from the fuel stream generator and to receive a laser beam configured to vaporize the fuel droplets to form a plasma, and
- a collector configured to collect and reflect radiation emitted by the plasma.
A lithographic apparatus, comprising:
- a source collector apparatus comprising
- the fuel stream generator having a nozzle connected to a fuel reservoir, wherein the nozzle has a gas inlet configured to provide a sheath of gas that constricts fuel flowing along the nozzle, and
- a plasma formation location arranged to receive fuel droplets from the fuel stream generator and to receive a laser beam configured to vaporize the fuel droplets to form a plasma, and a collector configured to collect and reflect radiation beam emitted by the plasma;
- an illumination system configured to condition the radiation beam;
- a support constructed to support a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam;
- a substrate table constructed to hold a substrate;
- and
- a projection system configured to project the patterned radiation beam onto a target portion of the substrate.
A method of generating fuel droplets, comprising:
- providing fuel under pressure in a reservoir such that the fuel flows into and along a nozzle;
- and
- introducing gas into the nozzle to form sheath of gas around the fuel flowing along the nozzle.
A fuel stream generator comprising a nozzle connected to a fuel reservoir, wherein the nozzle is provided with a gas inlet configured to provide gas that constricts the tin stream and prevents the tin stream from coming into contact with an inner wall of the nozzle.
Dependencies are inferred from the claim text.