Image sensor, manufacturing apparatus and method, and imaging apparatus
AssigneeSony Corporation
InventorYoshiaki Kitano
Life of this patent
Estimating the term…
Abstract
The present disclosure relates to an image sensor, a manufacturing apparatus and method, and an imaging apparatus that are capable of further enlarging a charge accumulation region. In the image sensor of this disclosure, a channel portion of a readout transistor that constitutes a pixel and a floating diffusion are formed so as to be overlaid with each other at least partly. For example, the channel portion and the floating diffusion are formed in the form of a column on a surface of a photodiode that constitutes the pixel. This disclosure can be applied to the manufacturing apparatus and method, and the imaging apparatus, in addition to the image sensor.
Claims20
An image sensor comprising:
- a channel portion of a readout transistor that constitutes a pixel;
- and
- a floating diffusion,
- wherein the channel portion and the floating diffusion are formed so as to be overlaid with each other at least partly.
A manufacturing apparatus that manufactures an image sensor, the manufacturing apparatus comprising:
- a channel forming unit that forms a channel portion of a readout transistor that constitutes a pixel of the image sensor;
- and
- a floating diffusion forming unit that forms a floating diffusion so that the floating diffusion and the channel portion formed by the channel forming unit is overlaid with each other at least partly.
A manufacturing method that manufactures an image sensor, the manufacturing method comprising:
- forming a channel portion of a readout transistor that constitutes a pixel of the image sensor, by a channel forming unit;
- and
- forming a floating diffusion so that the floating diffusion and the formed channel portion is overlaid with each other at least partly, by a floating diffusion forming unit.
An imaging apparatus comprising:
- an image sensor formed so that a channel portion of a readout transistor that constitutes a pixel and a floating diffusion are overlaid with each other at least partly;
- and
- an image processing unit that executes image processing on an image of an object obtained in the image sensor.
Dependencies are inferred from the claim text.