Substrate inspection method, substrate manufacturing method and substrate inspection device

A substrate manufacturing method, comprising:

• a substrate formation step of constituting a substrate having a plurality of holes formed on a plate-shaped material so as to extend over front and rear surfaces of the plate-shaped material;
• an image acquisition step of picking-up an image of the holes formed on the substrate via an optical system including a microscope having an objective lens of a specific magnification, from one surface side of the substrate constituted in the substrate formation step;
• a super resolution image processing step of obtaining a super resolution image corresponding to a picked-up image via an optical system including a microscope having an objective lens of higher magnification than the specific magnification, by applying super resolution image processing to the image obtained in the image acquisition step;
• and
• an inspection step of inspecting a proper or improper hole formed on the substrate using the super resolution image obtained in the super resolution image processing step.

A substrate inspection device for inspecting a substrate having a plurality of holes on a plate-shaped material so as to extend over front and rear surfaces of the plate-shaped material, the device comprising:

• an image acquisition unit configured to pick-up an image of the holes formed on the substrate via an optical system including a microscope having an objective lens of a specific magnification, from one surface side of the substrate;
• a super resolution image processing unit configured to obtain a super resolution image corresponding to a picked-up image via an optical system including a microscope having an objective lens of higher magnification than the specific magnification, by applying super resolution image processing to the image obtained by the image acquisition unit;
• and
• an inspection unit configured to inspect a proper or improper hole formed on the substrate using the super resolution image obtained by the super resolution image processing unit.