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US 2015/0028962 A1Published application
Radio frequency signal splitter and matcher
AssigneeTokyo Electron Limited
InventorBarton Lane
Life of this patent
Estimating the term…
Abstract
This application relates to systems and methods for splitting a current signal into at least two signals that are out of phase with each other. The power splitter may include a conductive element that may generate standing magnetic field that alternates at specified frequency. An inductor placed near or in the magnetic field may induce an alternating current at the specified frequency. Each end of the inductor may be coupled to a connector that may be coupled to an antenna that may be incorporated into a plasma processing chamber.
Claims24
A radio frequency (RF) power splitter, comprising:
- a conductive element configured to transmit alternating current in a standing wave that comprises a low voltage point near a center portion of the conductive element, the conductive element being configured to generate a magnetic field that extends around an axis of the conductive element when the alternating current is received from a RF generator;
- an inductor that is physically separate from the conductive element and adjacent to the low voltage point and is configured to receive the magnetic field that can be generated by the conductive element, the inductor comprising:
- a first end configured to transmit current based, at least in part, on the inductor receiving the magnetic field;
- a second end configured to transmit current based, at least in part, on the inductor receiving the magnetic field, the current from the second end being out of phase from the current that can be transmitted from the first end;
- a first current output that can be coupled to a first antenna and to the first end of the inductor;
- and
- a second current output that can be coupled to a second antenna and to the second end of the inductor.
4 more elements
A radio frequency (RF) power splitter, comprising:
- a conductive rod comprising:
- a first end portion that is coupled to a first capacitor and configured to receive alternating current from a RF generator;
- a second end portion that is coupled to a second capacitor, the first and second capacitor being configured to maintain a standing wave of the alternating current;
- a third capacitor that is coupled in parallel with the conductive rod and that is configured to match an impedance of the RF power splitter with an impedance one or more plasma chambers;
- and
- a low voltage node within a center portion of the conductive rod that is based, at least in part, on the standing wave;
- an inductor that is offset from the low voltage node of the conductive rod and comprises an axis that is substantially perpendicular to the conductive rod, the inductor configured to provide a first current signal to a first end of the inductor that is out of phase with a second current signal that is provided to a second end of the inductor when the alternating current is applied to the conductive rod;
- a first current output that can be coupled to at least one plasma chamber and the first end of the inductor;
- and
- a second current output that can be coupled to the at least one plasma chamber and the second end of the inductor.
7 more elements
A radio frequency (RF) power splitter, comprising:
- a conductive element configured to maintain a standing wave of an alternating magnetic field and to match an impedance of the RF power splitter to an impedance of a plasma reactor;
- an inductive element configured to generate a first alternating current signal and a second alternating current signal based, at least in part, on being exposed to the alternating magnetic field, the first alternating current signal being out of phase from the second alternating current signal;
- a first output that is configured to provide the first alternating current signal to a first antenna in the plasma reactor;
- and
- a second output that is configured to provide the second alternating current signal to a second antenna in the plasma reactor.
2 more elements
Dependencies are inferred from the claim text.