Low-profile wireless passive resonators for sensing

A system for wirelessly sensing at least one physical or environmental parameter, comprising:

• at least one resonator for sensing said physical or said environmental parameter comprising:
• a support having a support surface, and
• a polymer-derived ceramic (PDC) element positioned on said support surface including:
• a PDC layer, and
• a metal patch on said PDC layer,
• wherein said metal patch is electrically isolated from all surrounding structure, and
• wherein said resonator has a resonant frequency that changes as a function of said physical or said environmental parameter, and
• a wireless RF reader located remotely from said resonator, said wireless RF reader for transmitting a wide-band RF interrogation signal that excites said resonator, wherein said wireless RF reader detects a sensing signal retransmitted by said resonator and includes a processor for determining said physical or said environmental parameter at a location of said resonator.

A method of forming a resonator, comprising:

• providing a support having a top surface that provides a ground plane;
• forming a polymer-derived ceramic (PDC) element on said top surface, including:
• depositing a polymer-derived ceramic (PDC) precursor layer on said top surface;
• lithographically defining at least one patterned PDC precursor layer, and
• converting said patterned PDC precursor layer into said PDC element;
• forming a metal patch on said PDC element;
• wherein said metal patch is electrically isolated from all surrounding structure, and
• wherein said resonator has a resonant frequency that changes as a function of a physical or said environmental parameter.