Microfabricated magnetic field transducer with flux guide
AssigneeInnovative Micro Technology
InventorBenedikt Zeyen
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Abstract
A microfabricated magnetic field transducer uses a magnetically sensitive structure in combination with one or more permeable magnetic flux guides. The flux guides may route off-axis components of an externally applied magnetic field across the sensitive axis of the magnetically sensitive structure, or may shield the magnetically sensitive structure from off-axis, stray fields or noise sources. A combination of flux guides and magnetically sensitive structures arranged on a single substrate may enable an integrated, 3-axis magnetometer in a single package, greatly improving cost and performance.
Claims26
A magnetic transducer sensitive to an external magnetic field, comprising:
- a magnetically sensitive structure having one axis of maximum sensitivity, disposed on a surface of a substrate;
- and
- at least one flux guide having high magnetic permeability and configured to route at least one component of the external magnetic field along the one axis of the magnetically sensitive member.
A method for making a magnetic transducer, comprising:
- forming a magnetically sensitive structure having one axis of maximum sensitivity, disposed on a surface of a substrate;
- and
- forming at least one flux guide having high magnetic permeability and configured to route at least one component of the external magnetic field along the one axis of the magnetically sensitive member.
Dependencies are inferred from the claim text.