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US 2015/0028855 A1Published application
Apparatus for testing magnetic field sensor on wafer and method thereof
AssigneeMagnaChip Semiconductor, Ltd.
InventorsDong Ho Kim, Ki Seok Cho
Life of this patent
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Abstract
An apparatus and a method for testing a magnetic field sensor are provided, in which the method includes arranging a coil for generating a magnetic field, applying the magnetic field to the magnetic field sensor using the coil, and detecting the magnetic field applied to the magnetic field sensor.
Claims21
A method for testing a magnetic field sensor on a wafer, comprising:
- arranging a coil configured to generate a magnetic field on the wafer;
- applying the magnetic field to the magnetic field sensor using the coil;
- and
- detecting the magnetic field applied to the magnetic field sensor.
1 more element
An apparatus for testing a magnetic field sensor, comprising:
- a wafer comprising a magnetic field sensor;
- and
- a ring-shaped coil configured to generate a magnetic field to the magnetic field sensor, wherein
- the magnetic field sensor is positioned a distance away from a center point of the coil.
1 more element
A method for testing a multi-axis magnetic field sensor, the method comprising:
- providing a coil configured to generate a magnetic field having multi-axis components;
- providing the multi-axis components of the magnetic field to the multi-axis magnetic field sensor;
- and
- detecting the multi-axis components of the magnetic field using the multi-axis magnetic field sensor.
1 more element
Dependencies are inferred from the claim text.