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US 2015/0028500 A1Published application
Forming alignment mark and resulting mark
AssigneeGlobalfoundries Inc.
InventorsGuoxiang NING, Soon Yoeng TAN, Seok Yan POH, Paul ACKMANN
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Abstract
Methods for forming an alignment mark and the resulting mark are disclosed. Embodiments may include forming a first shape having rotational symmetry; forming a second shape; and forming an alignment mark by combining the first shape and one or more of the second shape, wherein the alignment mark has rotational symmetry.
Claims20
A method comprising:
- forming a first shape having rotational symmetry;
- forming a second shape;
- and
- forming an alignment mark by combining the first shape and one or more of the second shape,
- wherein the alignment mark has rotational symmetry.
2 more elements
An apparatus comprising:
- a substrate;
- and
- one or more rotationally symmetric alignment marks on the substrate,
- wherein the one or more rotationally symmetric alignment marks comprise:
- a first shape having rotational symmetry;
- and
- at least one of a second shape.
4 more elements
A method comprising:
- forming a first shape having 90-degree rotational symmetry;
- and
- forming at least one of a second shape, with an edge of each of the at least one second shape being contiguous with a separate edge of the first shape, forming an alignment mark,
- wherein the alignment mark has 90-degree rotational symmetry.
1 more element
Dependencies are inferred from the claim text.