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US 2015/0028492 A1Published application
Semiconductor devices having bit line structures disposed in trenches, methods of fabricating the same, packages including same, modules including the same, and systems including the same
AssigneeSK hynix Inc.
InventorsJin Ki JUNG, Myoung Soo KIM
Life of this patent
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Abstract
Semiconductor devices are provided. The semiconductor device includes a bit line contact plug and a storage node contact plug electrically connected to an active region of a substrate. A bit line structure is disposed on the bit line contact plug to extend in a first direction. The bit line structure is disposed in a trench pattern that intrudes into a side of the storage node contact plug. Related methods and systems are also provided.
Claims13
A semiconductor device comprising:
- a bit line contact plug and a storage node contact plug electrically connected to an active region of a substrate;
- and
- a bit line structure disposed on the bit line contact plug and extending in a first direction,
- wherein the bit line structure is disposed in a trench pattern that intrudes into a side of the storage node contact plug.
1 more element
A semiconductor device comprising:
- a trench pattern disposed between a pair of first conductive plugs to extend in a first direction, the trench pattern including recesses intruding into opposing sides of the pair of first conductive plugs;
- and
- a line structure disposed in the trench pattern,
- wherein the line structure is disposed on a second conductive plug which is spaced apart from the pair of first conductive plugs.
1 more element
Dependencies are inferred from the claim text.