Method for off-grid routing structures utilizing self aligned double patterning (sadp) technology

A device comprising:

• a hardmask on a substrate;
• a plurality of first mandrels on the hardmask;
• a first spacer on each side of each of the first mandrels;
• a plurality of first non-mandrel regions of the substrate being separated from the first mandrels and between two of the first spacers, each of the first mandrels, first non-mandrel regions, and first spacers having a width equal to a distance;
• a second mandrel having a width of at least twice the distance and having a second spacer adjacent to one of the first non-mandrel regions and/or providing a second non-mandrel region having a width of at least twice the distance and being adjacent to at least one of the first spacers or a third spacer of a third mandrel and separated from one or more block masks;
• wherein the first mandrels are removed after providing the first spacers;
• wherein the hardmask is etched and each respective spacer of the first spacers prevents etching of one or more portions covered by the respective spacer;
• wherein the substrate is etched after etching of the hardmask, the hardmask preventing etching of portions covered by the hardmask;
• and
• a metal layer in recesses formed by the etching of the substrate.

A device comprising:

• a hardmask on a substrate;
• a plurality of first mandrels on the hardmask;
• a first spacer on each side of each of the first mandrels;
• a plurality of first non-mandrel regions of the substrate being separated from the first mandrels and between two of the first spacers, each of the first mandrels, first non-mandrel regions, and first spacers having a width equal to a distance;
• and
• a second mandrel having a width of at least twice the distance and being separated from one of the first non-mandrel regions by a second spacer and/or providing a second non-mandrel region having a width of at least twice the distance and being adjacent to at least one of the first spacers or a third spacer of a third mandrel and separated from one or more block masks.