Method for manufacturing a conducting contact on a conducting element
AssigneesCommissariat A L'energie Atomique Et Aux Ene Alt, STMicroelectronics S.r.l.
InventorsJean-Philippe COLONNA, Perceval COUDRAIN
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AssigneesCommissariat A L'energie Atomique Et Aux Ene Alt, STMicroelectronics S.r.l.
InventorsJean-Philippe COLONNA, Perceval COUDRAIN
Estimating the term…
The invention relates to a method for producing an interconnection pad on a conducting element comprising an upper face and a side wall; the method being executed from a substrate at least the upper face of which is insulating; the conducting element going through at least an insulating portion of the substrate, the method being characterized in that it comprises the sequence of the following steps: a step of embossing the conducting element, a step of forming, above the upper insulating face of the substrate, a stack of layers comprising at least one electrically conducting layer and one electrically resistive layer, a step of partially removing the electrically resistive layer, a step of electrolytic growth on the portion of the electrically conducting layer so as to form at least one interconnection pad on said conducting element.
A method for producing an interconnection pad on a conducting element comprising an upper face and a side wall;
Dependencies are inferred from the claim text.