Method for manufacturing x-ray flat panel detector and x-ray flat panel detector tft array substrate

A method for manufacturing an X-ray flat panel detector, comprising:

• a panel manufacturing process of manufacturing an X-ray flat panel detector TFT array substrate including an insulating substrate, a plurality of pixels, scanning lines, signal lines, a scanning line connection pad, a signal line connection pad, a common interconnect ring, protection diodes, and an external voltage application pad, the plurality of pixels being two-dimensionally arranged at a surface of the insulating substrate, the plurality of pixels including a thin film transistor and a photoelectric conversion film, the scanning line being provided for each row of the plurality of pixels, the signal line being provided for each column of the plurality of pixels, the scanning line connection pad being provided at an end portion of the scanning line, the signal line connection pad being provided at an end portion of the signal line, the common interconnect ring being provided around the plurality of pixels, the protection diodes being provided between the common interconnect ring and the scanning lines and between the common interconnect ring and the signal lines, the external voltage application pad being connected between a connection unit for the common interconnect ring and the protection diodes on the same side of the signal lines and a connection unit for the common interconnect ring and the protection diodes on the same side of the scanning lines;
• and
• an inspection process of inspecting the X-ray flat panel detector TFT array substrate by applying a reference bias voltage to the external voltage application pad, providing a signal to the scanning line connection pad to switch the thin film transistor ON, and reading, from the signal line connection pad, an electrical signal flowing through the signal line.