# US 2015/0028301 A1 · Organic light-emitting display apparatus and method for manufacturing the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2015/0028301 A1 - Document ID: US20150028301A1 - Status: Published application - Kind: A1 - Application number: 14/257,379 - Filed: 2014-04-21 - Published: 2015-01-29 - Earliest claimed: 2013-07-25 - Assignees: Samsung Display Co., Ltd. - Inventors: SU-HYUK CHOI; HYUN KIM; JAE-SUN LEE; JAI-HYUK CHOI; UNG-SOO LEE; JIN-WOO PARK - Web page: https://patentgrep.com/patent/US20150028301A1 ## CPC - H10K 59/873: {Encapsulations} - H10K 71/16: using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering - H10K 71/40: Thermal treatment, e.g. annealing in the presence of a solvent vapour - H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES ## Abstract An organic light-emitting display apparatus includes: a substrate, and an organic light-emitting device disposed on the substrate. The organic light-emitting device includes a first electrode, a second electrode, and an intermediate layer including at least an organic emission layer. In addition, the organic light-emitting display apparatus further includes a thin film encapsulating layer disposed on the organic light-emitting device. The thin film encapsulating layer includes at least one inorganic film including a low temperature viscosity transition (LVT) inorganic material. The LVT inorganic material includes tin oxide and at least one of boron oxide (B2O3), bismuth oxide (Bi2O3), barium oxide (BaO), and ammonium dihydrogen phosphate (NH4H2PO4). ## Claims ### Claim 1 An organic light-emitting display apparatus comprising: a substrate; an organic light-emitting device disposed on the substrate, wherein the organic light-emitting device comprises a first electrode, a second electrode, and an intermediate layer including at least an organic emission layer; and a thin film encapsulating layer disposed on the organic light-emitting device, wherein the thin film encapsulating layer comprises at least one inorganic film including a low temperature viscosity transition (LVT) inorganic material, wherein the LVT inorganic material includes tin oxide and at least one of boron oxide (B2O3), bismuth oxide (Bi2O3), barium oxide (BaO), and ammonium dihydrogen phosphate (NH4H2PO4). ### Claim 2 (depends on 1) The organic light-emitting display apparatus of claim 1, wherein the LVT inorganic material further includes at least one of tin fluoride, niobium oxide, and tungsten oxide. ### Claim 3 (depends on 1) The organic light-emitting display apparatus of claim 1, wherein the LVT inorganic material includes tin oxide (SnO) and X, wherein X is at least one of B2O3, Bi2O3, BaO, and NH4H2PO4. ### Claim 4 (depends on 1) The organic light-emitting display apparatus of claim 1, wherein the LVT inorganic material includes tin oxide (SnO), tin fluoride (SnF2), and X, wherein X is at least one of B2O3, Bi2O3, BaO, and NH4H2PO4. ### Claim 5 (depends on 1) The organic light-emitting display apparatus of claim 1, wherein the LVT inorganic material includes tin oxide (SnO), tin fluoride (SnF2), X, and niobium oxide (NbO), wherein X is at least one of B2O3, Bi2O3, BaO, and NH4H2PO4. ### Claim 6 (depends on 1) The organic light-emitting display apparatus of claim 1, wherein the LVT inorganic material includes tin oxide (SnO), tin fluoride (SnF2), X, and tungsten oxide (WO3) , wherein X is at least one of B2O3, Bi2O3, BaO, and NH4H2PO4. ### Claim 7 (depends on 1) The organic light-emitting display apparatus of claim 1, wherein a viscosity transition temperature of the LVT inorganic material is a minimum temperature capable of providing a flowability to the LVT inorganic material. ### Claim 8 (depends on 1) The organic light-emitting display apparatus of claim 1, wherein a viscosity transition temperature of the LVT inorganic material is lower than a metamorphic temperature of a material included in the intermediate layer of the organic light-emitting device. ### Claim 9 (depends on 1) The organic light-emitting display apparatus of claim 1, further comprising a planarization layer or a protection layer disposed between the organic light-emitting device and the thin film encapsulating layer. ### Claim 10 (depends on 1) The organic light-emitting display apparatus of claim 1, wherein the thin film encapsulating layer covers a top surface and a side of the organic light-emitting device. ### Claim 11 A method for manufacturing an organic light-emitting display apparatus, the method comprising: forming an organic light-emitting device on a substrate, wherein the organic light-emitting device includes a first electrode, a second electrode, and an intermediate layer including at least an organic emission layer; and forming a thin film encapsulating layer on the organic light-emitting device, wherein the thin film encapsulating layer comprises at least one inorganic film including a low temperature viscosity transition (LVT) inorganic material, wherein the LVT inorganic material includes tin oxide and at least one of boron oxide (B2O3), bismuth oxide (Bi2O3), barium oxide (BaO), and ammonium dihydrogen phosphate (NH4H2PO4). ### Claim 12 (depends on 11) The method of claim 11, wherein the forming of the thin film encapsulating layer is performed using a sputtering process. ### Claim 13 (depends on 12) The method of claim 12, wherein the sputtering process is performed using a sputtering target that includes tin oxide and at least one of B2O3, Bi2O3, BaO, and NH4H2PO4. ### Claim 14 (depends on 12) The method of claim 12, wherein the sputtering process is performed while the substrate is moving in at least one direction. ### Claim 15 (depends on 12) The method of claim 12, wherein the sputtering process uses two faced sputtering targets that do not face the substrate. ### Claim 16 (depends on 15) The method of claim 15, further comprising: generating a plasma in a space between the two faced sputtering targets; and disposing the substrate to face the space where the plasma is generated. ### Claim 17 (depends on 16) The method of claim 16, wherein one or more magnet units are disposed to face a surface opposite to a surface facing the plasma in surfaces of the two faced sputtering targets. ### Claim 18 (depends on 11) The method of claim 11, wherein the forming of the thin film encapsulating layer comprises: forming a preliminary thin film encapsulating layer including the LVT inorganic material; and healing the preliminary thin film encapsulating layer. ### Claim 19 (depends on 18) The method of claim 18, wherein the healing of the preliminary thin film encapsulating layer is performed in a temperature range from a viscosity transition temperature of the LVT inorganic material to a metamorphic temperature of a material included in the intermediate layer of the organic light-emitting device. ### Claim 20 (depends on 18) The method of claim 18, wherein the healing of the preliminary thin film encapsulating layer is performed in a temperature range from a viscosity transition temperature of the LVT inorganic material to a minimum value of metamorphic temperatures of a material included in the intermediate layer of the organic light-emitting device. ### Claim 21 (depends on 18) The method of claim 18, wherein the healing of the preliminary thin film encapsulating layer is performed at a viscosity transition temperature of the LVT inorganic material. ### Claim 22 (depends on 18) The method of claim 18, wherein the healing of the preliminary thin film encapsulating layer is performed by annealing the preliminary thin film encapsulating layer in a temperature range of about 80° C. to about 132° C. for about one hour to about three hours. ### Claim 23 (depends on 18) The method of claim 18, wherein the healing of the preliminary thin film encapsulating layer is performed in a vacuum atmosphere or an inert gas atmosphere. ### Claim 24 An organic light-emitting display apparatus comprising: a substrate; an organic light-emitting device disposed on a top surface of the substrate, wherein the organic light-emitting device comprises a first electrode, a second electrode, and an intermediate layer including at least an organic emission layer; and a thin film encapsulating layer covering a top surface and opposing sidewalls of the organic light-emitting device and having lower edges which protrude outwardly along the top surface of the substrate, wherein the thin film encapsulating layer comprises at least one inorganic film including a low temperature viscosity transition (LVT) inorganic material, wherein the LVT inorganic material includes tin oxide and at least one of boron oxide (B2O3), bismuth oxide (Bi2O3), barium oxide (BaO), and ammonium dihydrogen phosphate (NH4H2PO4). ### Claim 25 (depends on 24) The organic light-emitting display apparatus of claim 24, wherein the thin film encapsulating layer contacts the top surface of the substrate.