Back to results
US 2015/0028225 A1Published application
Method for manufacturing a tem-lamella and assembly having a tem-lamella protective structure
AssigneeCarl Zeiss Microscopy GmbH
InventorLorenz Lechner
Life of this patent
Estimating the term…
Abstract
A method for manufacturing a TEM-lamella is disclosed. The method includes: disposing a self-supporting protective structure on a surface of a substrate; bonding the protective structure to the substrate; cutting out a lamella from the substrate using a particle beam so that the lamella remains bonded to at least a portion of the protective structure; fastening a first tool to the lamella; and moving away the lamella from a residual portion of the substrate by moving the first tool relative to the substrate.
Claims26
A method, comprising:
- disposing a self-supporting protective structure on a surface of a substrate;
- bonding the protective structure to the substrate;
- cutting out a lamella from the substrate using a particle beam so that the lamella remains bonded to at least a portion of the protective structure;
- fastening a first tool to the lamella;
- and
- moving the first tool relative to the substrate to move the lamella away from a residual portion of the substrate,
- wherein bonding the protective structure to the substrate comprises a process selected from the group consisting of:
- forming molecular bonds between the protective structure and the substrate via a process that comprises:
- directing a particle beam onto at least one member selected from the group consisting of the protective structure and the substrate;
- and depositing only material dislodged via the particle beam from at least member selected from the group consisting of the protective structure and the substrate;
- and
- applying an adhesive agent to at least one member selected from the group consisting of the protective structure and the substrate;
- and curing the adhesive agent by directing a beam onto a member selected from the group consisting of the adhesive agent, the substrate in proximity of the adhesive agent, and the protective structure in proximity of the adhesive agent, wherein the beam is selected from the group consisting of a particle beam and a light beam.
10 more elements
A method, comprising:
- bonding a self-supporting protective structure to a substrate;
- cutting out a lamella from the substrate using a particle beam so that the lamella remains bonded to at least a portion of the protective structure;
- and
- moving a tool relative to the substrate to move the lamella away from a residual portion of the substrate,
- wherein bonding the protective structure to the substrate comprises a process selected from the group consisting of:
- directing a particle beam onto at least one member selected from the group consisting of the protective structure and the substrate;
- and depositing only material dislodged via the particle beam from at least member selected from the group consisting of the protective structure and the substrate;
- and
- applying an adhesive agent to at least one member selected from the group consisting of the protective structure and the substrate;
- and curing the adhesive agent by directing a beam onto a member selected from the group consisting of the adhesive agent, the substrate in proximity of the adhesive agent, and the protective structure in proximity of the adhesive agent, wherein the beam is selected from the group consisting of a particle beam and a light beam.
7 more elements
An assembly, comprising:
- a mount;
- and
- a TEM-lamella protective structure provided on the mount,
- wherein:
- the mount and the TEM-lamella protective structure are integrally formed from a material;
- a predetermined breaking point is between the mount and the TEM-lamella protective structure;
- a cross-section of the material at the predetermined breaking point is smaller than a cross-section of the material at regions of the mount and the TEM-lamella protective structure;
- and
- the regions are adjoined to the predetermined breaking point.
6 more elements
Dependencies are inferred from the claim text.