Arrangement and method for transporting radicals
AssigneeMapper Lithography IP B.V.
InventorsPieter Kruit, Marc Smits
Life of this patent
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Abstract
The invention relates to an arrangement for transporting radicals. The arrangement includes a plasma generator and a guiding body. The plasma generator includes a chamber (2) in which a plasma may be formed. The chamber has an inlet (5) for receiving an input gas, and one or more outlets (6) for removal of at least one of the plasma and radicals created therein. The guiding body is hollow and is arranged for guiding radicals formed in the plasma towards an area or volume at which contaminant deposition is to be removed. The chamber inlet is coupled to a pressure device (40) for providing a pulsed pressure into the chamber so as to create a flow in the guiding body.
Claims17
1-32. (canceled)
Electron beam lithography system comprising:
- a beamlet generator for generating a plurality of electron beamlets;
- a plurality of beamlet manipulator elements for manipulating the electron beamlets, at least one of the beamlet manipulator elements comprising an aperture array;
- a plasma generator comprising a chamber in which a plasma may be formed, the chamber comprising an inlet for receiving an input gas, and one or more outlets for removal of at least one of the plasma and radicals created therein;
- and
- a hollow guiding body for guiding radicals formed in the plasma towards the aperture array at which contaminant deposition is to be removed;
- wherein the chamber is provided with a flow restrictor.
Pressure regulator for connection to a chamber containing a plasma, the pressure regulator having an inlet for receiving at least one of plasma and radicals created therein, the inlet having a first cross-sectional area, and an outlet with a second cross-sectional area, the first cross-sectional area being greater than the second cross-sectional area, the pressure regulator inlet being coupled to the plasma chamber, the pressure regulator outlet being removably attachable to a hollow body.
Dependencies are inferred from the claim text.