Inspection apparatus and inspection method

An inspection apparatus comprising:

• a first charged particle beam application unit configured to apply a first charged particle beam to second contact plugs of a sample to control potentials of electrically conductive films, the sample comprising a stack structure, electrically conductive layers, and first and second contact plugs, the electrically conductive films and insulating films being alternately stacked in the stack structure, the electrically conductive layers being provided in hole patterns formed in the stack structure in a stacking direction and being respectively connected to the electrically conductive films via a capacitance or a resistance, the first contact plugs being respectively connected to the electrically conductive layers, and the second contact plugs being connected to the electrically conductive layers;
• a second charged particle beam application unit configured to apply a second charged particle beam to the first contact plugs;
• a detector configured to detect secondary charged particles generated from a surface of the stack structure to output a signal;
• an image acquiring unit configured to process the signal to acquire a first image of the sample surface;
• and
• a judgment unit configured to judge an abnormality of the hole pattern from the acquired first image.