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US 2015/0028196 A1Published application
Field asymmetric ion mobility spectrometry filter
AssigneeOwlstone Inc.
InventorsDanielle Toutoungi, Matthew Hart, John Somerville, Jon Pearson, Max Allsworth, Richard Orrell, Antoni Negri, Jeremy Spinks, Martin Holden, Andrew H. Koehl, Alistair Taylor
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Abstract
Ion filter for FAIMS fabricated using the LIGA technique. The ion filter is manufactured using a metal layer to form the ion channels and an insulating support layer to hold the structure rigidly together after separation of the metal layer into two electrodes.
Claims53
A ion filter, comprising:
- at least one metal electrode layer;
- at least one ion channel formed through the at least one electrode layer;
- and
- at least one support layer adjacent the at least one electrode layer and configured to maintain regions of the at least one electrode layer in fixed relative positions, the at least one support layer including an aperture formed therein configured to permit gas to flow therethrough.
1 more element
A system for filtering ions, including:
- a controller;
- and
- an ion filter device comprising:
- at least one metal electrode layer;
- at least one ion channel formed through the at least one electrode layer;
- and
- at least one support layer adjacent the at least one electrode layer and configured to maintain regions of the at least one electrode layer in fixed relative positions, the at least one support layer including an aperture formed therein configured to permit gas to flow therethrough.
4 more elements
A method for fabricating ion filter devices comprising:
- fabricating an array of support structures on a sheet;
- fabricating a plurality of electrode structures;
- attaching said electrode structures to said sheet having an array of support structures;
- removing a portion of each said electrode structure to provide electrical isolation between electrode pairs;
- and
- separating said support structures and attached electrode pairs to provide individual ion filter devices.
3 more elements
Dependencies are inferred from the claim text.