Lightweight carrier structure, particularly for optical components, and method for its production
AssigneeBerliner Glas KGaA Herbert Kubatz GmbH & Co.
InventorsOliver BALDUS, Volker SCHMIDT
Life of this patent
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Abstract
A carrier structure (100), particularly for optical components, includes a carrier body (10) which is formed from ceramic with hollows (11), and at least one cover layer (21, 22) which is formed from glass, arranged on at least one surface of the carrier body (10), and is connected to the carrier body (10) by means of at least one bond connection (23, 24) produced by means of anodic bonding. Methods for producing the carrier structure (100) and the use of the carrier structure as a mirror body, carrier for optical components and/or mechanical carrier for dynamically moved components are also described.
Claims14
A carrier structure comprising:
- a carrier body having a thickness direction and a lateral direction and consisting of SiSiC ceramic with hollows, wherein the hollows extend in the thickness direction through the carrier body in such a manner that at least one side wall extending in the lateral direction remains, which forms at least one main surface of the carrier body and which closes one side of the carrier body in the lateral direction, and
- at least one cover layer comprising glass and arranged on the at least one main surface of the carrier body,
- wherein the at least one cover layer is connected to the at least one main surface of the carrier body by at least one anodic bond connection being produced by anodic bonding and the at least one anodic bond connection comprises an ion concentration gradient across an interface between the at least one cover layer and the at least one main surface of the carrier body connected to one another.
A method for producing a carrier structure, comprising the steps of:
- providing a carrier body having a thickness direction and a lateral direction, wherein the carrier body is formed from ceramic and has hollows, which extend in the thickness direction through the carrier body in such a manner that at least one side wall extending in the lateral direction remains, which forms at least one main surface of the carrier body and which closes one side of the carrier body in the lateral direction;
- and
- connecting at least one cover layer, which is formed from glass, to the at least one main surface of the carrier body by anodic bonding.
Dependencies are inferred from the claim text.