Manufacturing method of an apparatus for the processing of single molecules
AssigneeKoninklijke Philips N.V.
InventorsPieter Jan Van Der Zaag, Emiel Peeters, Roelof Koole, Falco Cornelius Marinus Jacobus Maria Van Delft
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Abstract
The invention relates to a method for manufacturing an apparatus for the processing of single molecules. According to this method, a self-assembling resist (155) is deposited on a processing layer (110, PL) and allowed to self-assemble into a pattern of two phases (155a, 155b). One of these phases (155a) is then selectively removed, and at least one aperture is generated in the processing layer (110, PL) through the mask of the remaining resist (155b). Thus apertures of small size can readily be produced that allow for the processing of single molecules (M), for example in DNA sequencing.
Claims15
A method for manufacturing an apparatus (100, 200, 300, 400) for the processing of single molecules (M), said method comprising the following steps:
- a) providing a “processing layer” (PL, PL1, PL2);
- b) depositing a self-assembling resist on said processing layer and letting it self-assemble into a pattern of two phases;
- c) removing selectively one phase of the self-assembling resist;
- d) generating at least one aperture (A, A1, A2, A3) in the processing layer (PL, PL1, PL2) through the mask of the remaining self-assembling resist.
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Dependencies are inferred from the claim text.