Lithium microbattery fabrication method
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsSami OUKASSI, Arnaud BAZIN
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Abstract
The method for fabricating a lithium microbattery is performed from a stack of layers successively including: a first layer made from a first material, a second layer made from a second material, a solid electrolyte layer and a first electrode. The method further includes etching to form a first pattern made from the first material and a second pattern made from the second material, the second pattern defining a covered area and an uncovered area of the electrolyte layer. The uncovered area is then etched using the second pattern as etching mask. After etching of the first pattern, a lithium-based layer is formed on the second pattern, the lithium-based layer and the second pattern forming a second lithium-based electrode.
Claims10
A fabrication method of a lithium microbattery, comprising the following successive steps:
- providing a stack of layers successively comprising:
- a first layer made from a first material;
- a second layer made from a second material configured to combine with the lithium atoms;
- a solid layer;
- a first electrode;
- etching of the first and second materials to form a first pattern made from the first material and a second pattern made from the second material, the second pattern defining an uncovered area and a covered area of the electrolyte layer;
- etching of the uncovered area of the electrolyte layer using the second pattern as etching mask, and etching of the first pattern;
- depositing in localized manner a lithium-based layer on the second pattern, the second material being configured such that the lithium atoms diffuse into the second pattern, the lithium-based layer and the second pattern forming a lithium-based second electrode.
Dependencies are inferred from the claim text.