Gas storage and dispensing system with monolithic carbon adsorbent
AssigneeAdvanced Technology Materials, Inc.
InventorJ. Donald Carruthers
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Abstract
A pyrolyzed monolith carbon physical adsorbent that is characterized by at least one of the following characteristics: (a) a fill density measured for arsine gas at 25° C. and pressure of 650 torr that is greater than 400 grams arsine per liter of adsorbent; (b) at least 30% of overall porosity of the adsorbent including slit-shaped pores having a size in a range of from about 0.3 to about 0.72 nanometer, and at least 20% of the overall porosity including micropores of diameter<2 nanometers; and (c) having a bulk density of from about 0.80 to about 2.0 grams per cubic centimeter, preferably from 0.9 to 2.0 grams per cubic centimeter.
Claims20
A gas package, comprising a vessel, a dispensing assembly coupled to the vessel for discharging gas therefrom, and monolithic carbon adsorbent in the vessel, wherein the monolithic carbon adsorbent has a bulk density of from 0.9 to 2.0 g/cm3, a fill density measured for arsine gas at 25° C. and pressure of 650 torr that is greater than 400 g arsine per liter of adsorbent, and porosity at least 20% of which comprises pores of diameter below 2 nm.
Dependencies are inferred from the claim text.