Deposition apparatus and method for manufacturing display apparatus using the deposition apparatus
AssigneeSamsung Display Co., Ltd.
InventorOu-Hyen Kim
Life of this patent
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AssigneeSamsung Display Co., Ltd.
InventorOu-Hyen Kim
Estimating the term…
A deposition apparatus may include a first substrate mounting member and a second substrate mounting member that may overlap the first substrate mounting member. The deposition apparatus may further include a sputter unit disposed in a space located between the first substrate mounting member and the second substrate mounting member. The sputter unit may have a first opening and a second opening. The first opening may be disposed closer to the first substrate mounting member than the second opening. The second opening may be disposed closer to the second substrate mounting member than the first opening. A first set of material and a second set of material may be simultaneously provided through the first opening and the second opening, respectively.
A deposition apparatus comprising:
A method for manufacturing a display apparatus, the method comprising:
Dependencies are inferred from the claim text.