Back to results
US 2015/0027643 A1Published application
Evaporation apparatus
AssigneeSamsung Display Co., Ltd.
InventorsChul-Hwan Park, Nam-Jin Kim
Life of this patent
Estimating the term…
Abstract
An evaporation apparatus includes a vaporization chamber including a liquid inlet and a vapor outlet, a spray chamber which is connected to the vaporization chamber and sprays a vapor which has flowed out from the vapor outlet of the vaporization chamber, and a release chamber which is connected to the vaporization chamber and reduces a pressure of the vapor which has flowed out from the vapor outlet of the vaporization chamber.
Claims20
An evaporation apparatus comprising:
- a vaporization chamber comprising a liquid inlet and a vapor outlet;
- a spray chamber which is connected to the vaporization chamber and sprays a vapor which has flowed out from the vapor outlet of the vaporization chamber;
- and
- a release chamber which is connected to the vaporization chamber and the spray chamber, and reduces a pressure of the vapor which has flowed out from the vapor outlet of the vaporization chamber.
1 more element
An evaporation apparatus comprising:
- a vaporization chamber comprising a liquid inlet and a vapor outlet;
- a spray chamber comprising a spray nozzle which is configured to spray a vapor which has flowed out from the vapor outlet of the vaporization chamber;
- and
- a filter member which is between the vaporization chamber and the spray nozzle of the spray chamber and filters out particles in the vapor which has flowed out from the vapor outlet of the vaporization chamber.
1 more element
Dependencies are inferred from the claim text.