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US 2015/0027376 A1Published application
Deposition film forming apparatus including rotating members
AssigneeTGO Tech. Corporation
InventorsChung Seok OH, Yoo Jin LEE, Jae Hak LEE
Life of this patent
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Abstract
A deposition film forming apparatus including rotary members includes a plurality of substrate supports, wherein a plurality of substrates are disposed on each of the substrate supports, and each of the substrates is rotated on the substrate supports by means of a gas-foil method.
Claims10
A deposition film forming apparatus comprising:
- a plurality of substrate supports,
- wherein a plurality of substrates are disposed on each of the substrate supports, and each of the substrates is rotated on the substrate supports by means of a gas-foil method.
Dependencies are inferred from the claim text.