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US 2015/0027367 A1Published application
Mask frame assembly for thin film deposition
AssigneeSamsung Display Co., Ltd.
InventorJeremy Hong
Life of this patent
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Abstract
A mask frame assembly for depositing a deposition material on a deposition substrate comprises a mask frame including an opening and frames surrounding the opening, and a mask coupled on the mask frame. A deformation prevention unit is formed on at least one region of the mask. Since the deformation prevention unit is formed on a peripheral portion of a deposition pattern in the mask, deformation of the mask in a vertical direction may be reduced. Accordingly, defective attaching of the mask to the substrate may be reduced.
Claims11
1-7. (canceled)
A mask frame assembly for a thin film deposition, the mask frame assembly comprising:
- a mask frame including an opening and frames surrounding the opening;
- and
- a mask coupled to the mask frame, the mask comprising:
- a plurality of deposition patterns which are separated from each other in a length-wise direction of the mask;
- and
- ribs disposed between adjacent deposition patterns and connecting the deposition patterns to each other, each rib comprising a first half-etched portion that does not penetrate through the mask, all edges of the first half-etched portion directly connected to a material that forms the mask, and a thickness of a first half-etched portion being less than a thickness of another portion of the mask.
3 more elements
Dependencies are inferred from the claim text.