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US 2015/0027221 A1Published application
Thermal flowmeter
AssigneeTem-Tech Lab. Co., Ltd.
InventorsMitsuyoshi AIZAWA, Hideki NARITA
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Abstract
A highly reliable, simple-structured and low-cost thermal flowmeter is provided. The thermal flowmeter in an embodiment according to the present invention includes a planar heating element located to surround a part of an outer side surface of a flow path; first and second temperature detection elements located on the planar heating element at a prescribed interval; and electrodes located at both of two ends of the planar heating element. The planar heating element contains a carbon material and cellulose fiber.
Claims10
A thermal flowmeter, comprising:
- a planar heating element located to surround a part of an outer side surface of a flow path;
- first and second temperature detection elements located on the planar heating element at a prescribed interval;
- and
- electrodes located at both of two ends of the planar heating element;
- wherein the planar heating element contains a carbon material and cellulose fiber.
2 more elements
A multi-channel thermal flowmeter, comprising:
- a plurality of thermal flowmeters each including a planar heating element located to surround a part of an outer side surface of a flow path and containing a carbon material and cellulose fiber, first and second temperature detection elements located on the planar heating element at a prescribed interval, and electrodes located at both of two ends of the planar heating element;
- and
- a plurality of abnormal flow rate detecting electronic circuits respectively connected to the plurality of thermal flowmeters, each of the plurality of abnormal flow rate detecting electronic circuits being for detecting abnormality of a flow rate of a fluid flowing in the flow path based on a signal output from the corresponding one of the plurality of thermal flowmeters.
Dependencies are inferred from the claim text.