Method for fabricating pad conditioning tool
AssigneeTera Xtal Technonology Corporation
InventorsChun-Han Tai, TZU-HSUAN DAI, Kuang-Ling Wei
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Abstract
A method for fabricating a pad conditioning tool includes the steps: preparing a sapphire substrate with a specific orientation plane, wherein the specific orientation plane is selected from a group consisting of a-plane, c-plane, r-plane, m-plane, n-plane and v-plane; utilizing screen printing technique and a screen plate in order to transfer an image pattern such that upon solidifying one side surface of the sapphire substrate is imprinted with the image pattern; and performing an etching process on the side surface of the sapphire substrate such that the side surface is formed with a plurality of micro particles of specific structures.
Claims12
A method for fabricating a pad conditioning tool comprising the steps:
- preparing a sapphire substrate with a specific orientation plane, wherein said specific orientation plane is selected from a group consisting of a-plane, c-plane, r-plane, m-plane, n-plane and v-plane;
- utilizing screen printing technique and a screen plate in order to transfer an image pattern such that upon solidifying one side surface of said sapphire substrate is imprinted with said image pattern;
- and
- performing an etching process on said side surface of said sapphire substrate such that said side surface is formed with a plurality of micro particles of specific structures.
Dependencies are inferred from the claim text.