Contaminant measurement substrate, apparatus and method for fabricating substrate using the same

A method for fabricating a substrate, the method comprising:

• preparing a contaminant measurement substrate including a base material configured to collect contaminants, and laser marks on the base material and defining a plurality of unit areas on the contaminant measurement substrate respectively corresponding to unit cells of the substrate;
• seating the contaminant measurement substrate on a first stage which is disposed inside a chamber which provides a space in which processes are performed, and collecting the contaminants of the chamber;
• seating the contaminant measurement substrate on a second stage which is disposed outside the chamber, and measuring the contaminants of the chamber which are collected with respect to the plurality of unit areas, by irradiating the contaminant measurement substrate with light using a contaminant measurement light source;
• and
• comparing a number of the contaminants of the chamber, which exist in a respective unit area among the plurality of unit areas, with a reference value, and determining whether the number of the contaminants of the chamber existing in the respective unit area exceeds the reference value.