Nanofluidic channels with gradual depth change for reducing entropic barrier of biopolymers
AssigneeInternational Business Machines Corporation
InventorsQinghuang Lin, Gustavo A. Stolovitzky, Chao Wang, Deqiang Wang
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Abstract
A device for passing a biopolymer molecule includes a nanochannel formed between a surface relief structure, a patterned layer forming sidewalls of the nanochannel and a sealing layer formed over the patterned layer to encapsulate the nanochannel. The surface relief structure includes a three-dimensionally rounded surface that reduces a channel dimension of the nanochannel at a portion of nanochannel and gradually increases the dimension along the nanochannel toward an opening position, which is configured to receive a biopolymer.
Claims18
A device for passing a biopolymer molecule, comprising:
- a nanochannel formed between a surface relief structure, a patterned layer forming sidewalls of the nanochannel and a sealing layer formed over the patterned layer to encapsulate the nanochannel;
- the surface relief structure including a three-dimensionally rounded surface that reduces a channel dimension of the nanochannel at a portion of nanochannel and gradually increases the dimension along the nanochannel toward an opening position, which is configured to receive a biopolymer.
A device for passing a biopolymer molecule, comprising:
- a substrate;
- a surface relief structure formed on the substrate and having at least one three-dimensionally rounded surface providing a gradually changing depth from a position on the surface relief structure along a channel, the surface relief structure forming a first surface of the channel;
- a patterned layer formed on the surface relief structure and forming sidewalls of the channel;
- and
- a sealing layer formed over the patterned layer to form a second surface of the channel opposite the first surface.
-20. (canceled)
Dependencies are inferred from the claim text.