Two dimensional material-based pressure sensor

A sensor system comprising:

• a measurement circuit;
• a sensor in communication with the measurement circuit, the sensor comprising:
• a substrate comprising:
• a back-electrode;
• a conductive layer, in communication with the back-electrode;
• and
• an insulating layer coupled to the conductive layer, the insulating layer comprising one or more cavity regions;
• a sensor membrane comprising a two-dimensional material and disposed adjacent to the insulating layer and covering at least one of the one or more cavity regions;
• a first sensing electrode in electrical communication with a first region of the sensor membrane;
• and
• a second sensing electrode in communication with a second region of the sensor membrane;
• wherein the sensor membrane is configured to respond to pressure changes exerted on the sensor membrane.

A sensor array system comprising:

• at least one measurement circuit;
• and
• an array of sensors in communication with the at least one measurement circuit, the array of sensors comprising two or more sensors, each of the two or more sensors comprising:
• a substrate comprising:
• a back-electrode;
• a conductive layer, in communication with the back-electrode;
• and
• an insulating layer coupled to the conductive layer, the insulating layer comprising one or more cavity regions;
• a sensor membrane comprising a two-dimensional material and disposed adjacent to the insulating layer and covering at least one of the one or more cavity regions;
• a first sensing electrode in electrical communication with a first region of the sensor membrane;
• and
• a second sensing electrode in communication with a second region of the sensor membrane.
• wherein the sensor membrane is configured to respond to pressure changes exerted on the two or more sensors.