Gas sensor
AssigneeKing Abdullah University of Science and Technology
InventorsRyan Luebke, Mohamed Eddaoudi, Hesham Omran, Youssef Belmabkhout, Osama Shekhah, Khaled N. Salama
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Abstract
A gas sensor using a metal organic framework material can be fully integrated with related circuitry on a single substrate. In an on-chip application, the gas sensor can result in an area-efficient fully integrated gas sensor solution. In one aspect, a gas sensor can include a first gas sensing region including a first pair of electrodes, and a first gas sensitive material proximate to the first pair of electrodes, wherein the first gas sensitive material includes a first metal organic framework material.
Claims32
A gas sensor comprising:
- a first gas sensing region comprising
- a first pair of electrodes;
- and
- a first gas sensitive material proximate to the first pair of electrodes,
- wherein the first gas sensitive material comprises a first metal organic framework material.
A method of making a gas sensor, comprising:
- forming a first gas sensitive region on a substrate by placing a first gas sensitive metal organic framework material proximate to a first pair of electrodes.
A gas sensor system, comprising:
- a substrate;
- a plurality of gas sensor units on the substrate, each unit comprising:
- a pair of electrodes, and
- a gas sensitive metal organic framework material proximate to the pair of electrodes;
- and
- a monitor module electrically connected to each pair of electrodes and configured to monitor at least one electronic property of each gas sensitive metal organic framework material.
A method of monitoring a gas concentration comprising:
- exposing a gas sensor region to a detectable gas;
- monitoring at least one electrical property of a gas sensitive material including a metal organic framework material;
- and
- correlating the electronic property of the gas sensitive material with the presence of the detectable gas.
Dependencies are inferred from the claim text.