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US 2015/0013481 A1Published application
Micro-scale pendulum
AssigneeHewlett-Packard Development Company, L.P.
InventorsJames Elmer Abbott, JR., John L. Williams, Pavel Kornilovich
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Abstract
A micro-scale pendulum structure. The structure includes a membrane having a peripheral support portion and an inner portion, and a micro-scale pendulum carried by the inner portion of the membrane.
Claims15
A micro-scale pendulum structure comprising:
- a membrane having a peripheral support portion and an inner portion;
- and
- a micro-scale pendulum carried by the inner portion of the membrane.
A method of fabricating a micro-scale pendulum structure, the method comprising:
- growing a layer of thermal oxide on a surface of a silicon slab;
- depositing photoresist on a surface of the silicon slab opposite the thermal oxide;
- patterning the photoresist to define a pendulum;
- and
- etching the silicon according to the pattern defined by the photoresist to form the pendulum.
2 more elements
Dependencies are inferred from the claim text.