Imprint apparatus and method of manufacturing article
AssigneeCanon Kabushiki Kaisha
InventorTsuyoshi Arai
Life of this patent
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Abstract
The present invention provides an imprint, apparatus which performs an imprint process of transferring a pattern onto a substrate, the apparatus comprising a deforming unit configured to deform the pattern surface by applying a force to the mold, an obtaining unit configured to obtain thickness information of the mold, a calculation unit configured to calculate a force to be applied to the mold based on the thickness information of the mold obtained by the obtaining unit, so that the pattern surface has a target, shape in the imprint process, and a control unit configured to control the deforming unit, to apply the force calculated by the calculation unit to the mold in the imprint process.
Claims10
An imprint apparatus which performs an imprint process of curing a resin on a substrate while a mold having a pattern surface on which a pattern is formed is kept in contact with the resin, and separating the mold from the cured resin, thereby transferring the pattern onto the substrate, the apparatus comprising:
- a deforming unit configured to deform the pattern surface by applying a force to the mold;
- an obtaining unit configured to obtain thickness information of the mold;
- a calculation unit configured to calculate a force to be applied to the mold based on the thickness information of the mold obtained by said obtaining unit, so that the pattern surface has a target shape in the imprint process;
- and
- a control unit configured to control said deforming unit to apply the force calculated by said calculation unit to the mold in the imprint process.
An imprint apparatus which performs an imprint process of curing a resin on a substrate while a mold having a pattern surface on which a pattern is formed is kept in contact with the resin, and separating the mold from the cured resin, thereby transferring the pattern onto the substrate, the apparatus comprising:
- a deforming unit configured to deform the pattern surface by applying a force to the mold;
- a storage unit configured to store a correspondence between a plurality of molds, and a force to be applied to each of the plurality of molds so that the pattern surface has a target shape in the imprint process;
- an obtaining unit configured to specify a mold to be used in the imprint process among the plurality of molds, and obtain a force to be applied to the specified mold based on the correspondence stored in said storage unit;
- and
- a control unit configured to control said deforming unit to apply the force obtained by said obtaining unit, to the mold in the imprint process.
A method of manufacturing an article, the method comprising:
- performing forming a pattern of a resin on a substrate using an imprint apparatus;
- and
- processing the substrate, on which the forming has been performed, to manufacture the article,
- wherein the imprint apparatus performs an imprint process of curing the resin on the substrate while a mold having a pattern surface on which a pattern is formed is kept in contact with the resin, and separating the mold from the cured resin, thereby transferring the pattern onto the substrate, the apparatus comprising:
- a deforming unit configured to deform the pattern surface by applying a force to the mold;
- an obtaining unit configured to obtain thickness information of the mold;
- a calculation unit configured to calculate a force to be applied to the mold based on the thickness information of the mold obtained by said obtaining unit, so that the pattern surface has a target shape in the imprint process;
- and
- a control unit configured to control said deforming unit to apply the force calculated by said calculation unit to the mold in the imprint process.
Dependencies are inferred from the claim text.