Scheduling method and recording medium recording scheduling program for substrate processing apparatus

A scheduling method by which a controller, included in a substrate processing apparatus including at least one single substrate processing type processing unit that processes substrates one at a time, prepares a schedule that defines operations of the substrate processing apparatus, the scheduling method comprising:

• a first step where the controller prepares the schedule so that a substrate processing process, in which the processing unit processes a substrate, a preliminary processing process, in which the processing unit performs preparation for the substrate processing process, are performed in an order of the preliminary processing process and the substrate processing process at the same processing unit;
• a second step where, when an abnormality occurs in the substrate processing apparatus in a period from a start of the preliminary processing process to before a start of the substrate processing process, the controller stops the substrate processing process at the processing unit designated in the first step;
• and
• a third step where, when the abnormality is resolved, the controller prepares the schedule so that a post-resolution preliminary processing process, in which the processing unit performs preparation for the substrate processing process, and the substrate processing process are performed in an order of the post-resolution preliminary processing process and the substrate processing process at the processing unit designated in the first step.