Image processing device, method for controlling same, program, and inspection system

A method for controlling an image processing device having illumination means having a surface light source for irradiating a measurement target including a specular object and a diffuse object with light of a predetermined illumination pattern, illumination control means configured to control the illumination pattern of the illumination means, and region recognition means configured to recognize a specular object region on the measurement target by analyzing an image obtained by the imaging means, the method comprising the steps of:

• acquiring a first image by imaging the measurement target using the imaging means, in a state where light of a first illumination pattern is irradiated from the illumination means;
• acquiring a second image by imaging the measurement target using the imaging means, in a state where light of a second illumination pattern is irradiated from the illumination means;
• and
• recognizing a specular object region on the measurement target based on a result of a comparison between the first image and the second image by the region recognition means,
• wherein the first image and the second image are images that include a plurality of the same channels,
• the first illumination pattern includes a plurality of first illumination sub-patterns that each corresponds to a different one of the plurality of channels, and that have mutually different emission intensity distributions,
• one first illumination sub-pattern among the plurality of first illumination sub-patterns has an emission intensity distribution in which an emission intensity is uniform in-plane, and the other first illumination sub-patterns have an emission intensity distribution in which an emission intensity changes linearly in accordance with an angle of incidence of light with respect to the measurement target when considered at a certain cross-section that includes an optical axis of the imaging means,
• the second illumination pattern includes a plurality of second illumination sub-patterns that each corresponds to a different one of the plurality of channels, and that have mutually different emission intensity distributions,
• the plurality of second illumination sub-patterns all have an emission intensity distribution in which an emission intensity changes linearly in accordance with an angle of incidence of light with respect to the measurement target when considered at a certain cross-section that includes the optical axis of the imaging means, and
• each first illumination sub-pattern and second illumination sub-pattern corresponding to the same channel have mutually different emission intensity distributions.

An inspection system comprising:

• illumination means having a surface light source for irradiating a measurement target including a specular object and a diffuse object with light of a predetermined illumination pattern;
• illumination control means configured to control the illumination pattern of the illumination means;
• imaging means configured to image the measurement target;
• region recognition means configured to recognize a specular object region on the measurement target by analyzing an image obtained by the imaging means;
• and
• inspection means configured to extract an image of the specular object region from the image obtained by the imaging means and inspecting the extracted image,
• wherein the region recognition means compares a first image obtained by imaging the measurement target in a state where light of a first illumination pattern is irradiated from the illumination means and a second image obtained by imaging the measurement target in a state where light of a second illumination pattern is irradiated from the illumination means, and recognizes the specular object region on the measurement target based on a result of the comparison,
• the first image and the second image are images that include a plurality of the same channels,
• the first illumination pattern includes a plurality of first illumination sub-patterns that each corresponds to a different one of the plurality of channels, and that have mutually different emission intensity distributions,
• one first illumination sub-pattern among the plurality of first illumination sub-patterns has an emission intensity distribution in which an emission intensity is uniform in-plane, and the other first illumination sub-patterns have an emission intensity distribution in which an emission intensity changes linearly in accordance with an angle of incidence of light with respect to the measurement target when considered at a certain cross-section that includes an optical axis of the imaging means,
• the second illumination pattern includes a plurality of second illumination sub-patterns that each corresponds to a different one of the plurality of channels, and that have mutually different emission intensity distributions,
• the plurality of second illumination sub-patterns all have an emission intensity distribution in which an emission intensity changes linearly in accordance with an angle of incidence of light with respect to the measurement target when considered at a certain cross-section that includes the optical axis of the imaging means, and
• each first illumination sub-pattern and second illumination sub-pattern corresponding to the same channel have mutually different emission intensity distributions.