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US 2014/0370640 A1Published application
High fidelity doping paste and methods thereof
AssigneeInnovalight, Inc.
InventorsElena Rogojina, Maxim Kelman, Giuseppe Scardera
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Abstract
A high-fidelity dopant paste is disclosed. The high-fidelity dopant paste includes a solvent, a set of non-glass matrix particles dispersed into the solvent, and a dopant.
Claims23
A method of doping a semiconductor substrate, comprising:
- depositing on a surface of a semiconductor substrate a dopant paste comprising a solvent, a set of non-glass matrix particles dispersed into the solvent, and a dopant, wherein the set of non-glass matrix particles is a set of ceramic particles selected from the group consisting of Al2O3, MgO, CeO2, TiO2, ZnO, ZrO2, ZrO2-3, and Y2O3, wherein the dopant is selected from the group consisting of phosphorous dopant, arsenic dopant, antimony dopant, boron dopant and gallium dopant;
- and
- heating the dopant paste on the surface of the semiconductor substrate to diffuse the dopant into the semiconductor substrate.
Dependencies are inferred from the claim text.