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US 2014/0370623 A1Published application
Evaporation apparatus and method
AssigneeTSMC Solar Ltd.
InventorsChung-Hsien WU, Chi-Yu CHIANG, Shih-Wei CHEN, Wen-Tsai YEN
Life of this patent
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Abstract
An evaporation apparatus comprises a chamber configured to contain at least one dispensing nozzle and at least one substrate to be coated. The chamber has at least one adjustable shielding member defining an adjustable aperture. The member is positioned between the at least one dispensing nozzle and the at least one substrate. The aperture is adjustable in at least one of the group consisting of area and shape. The at least one adjustable shielding member has a heater.
Claims20
Evaporation apparatus, comprising:
- a chamber configured to contain therein at least one substrate to be coated and at least one dispensing nozzle coupled to an evaporation source;
- the chamber having at least one adjustable shielding member defining an adjustable aperture, the shielding member positioned between the dispensing nozzle and a location of the substrate, the aperture being adjustable in at least one of the group consisting of area, shape, and orientation, the at least one adjustable shielding member having a heater.
Evaporation apparatus, comprising:
- a chamber configured to contain therein at least one substrate to be coated and at least one dispensing nozzle coupled to an evaporation source;
- and
- a plurality of movable plates positioned between the at least one dispensing nozzle and a position of the at least one substrate, the plates defining an adjustable aperture, at least one of the plates having a heater.
A method comprising:
- providing a chamber containing therein at least one substrate to be coated and at least one dispensing nozzle coupled to an evaporation source;
- adjusting at least one adjustable shielding member to set at least one of the group consisting of an area and a shape of an aperture, the member positioned between the at least one dispensing nozzle and the at least one substrate;
- and
- heating the at least one adjustable shielding member before or simultaneously with dispensing a vapor from the nozzle onto the substrate.
1 more element
Dependencies are inferred from the claim text.