Methods and systems for reducing bubbles in layers of photoresist material
AssigneeGlobalfoundries Inc.
InventorsKurt Hollis, Michael Van Tassel
Life of this patent
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Abstract
One illustrative system disclosed herein includes a tank adapted to hold a fluid, a photoresist filter adapted to receive the fluid and allow the fluid to flow through the filter, and a vibrator that is operatively coupled to the photoresist filter and adapted to vibrate the photoresist filter as the fluid flows through the photoresist filter. A method disclosed herein includes forcing a fluid through a photoresist filter and actuating a vibrator so as to vibrate the photoresist filter while the fluid is flowing through the photoresist filter.
Claims28
A system, comprising:
- a tank adapted to hold a fluid;
- a photoresist filter adapted to receive said fluid and allow said fluid to flow through said filter;
- and
- a vibrator that is operatively coupled to said photoresist filter and adapted to vibrate said photoresist filter as said fluid flows through said photoresist filter.
A system, comprising:
- a tank adapted to hold a photoresist material;
- a photoresist filter adapted to receive said photoresist material and allow said photoresist material to flow through said photoresist filter;
- and
- a vibrator that is operatively coupled to said photoresist filter and adapted to vibrate said photoresist filter as photoresist material flows through said photoresist filter.
A method, comprising:
- forcing a fluid through a photoresist filter;
- and
- actuating a vibrator so as to vibrate said photoresist filter while said fluid is flowing through said photoresist filter.
A method, comprising:
- forcing a photoresist material through a photoresist filter;
- and
- actuating a vibrator so as to vibrate said photoresist filter while photoresist material is being forced through said photoresist filter.
Dependencies are inferred from the claim text.