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US 2014/0370331 A1Published application
Method of fabricating ion implantation magnetically and thermally isolated bits in hamr bpm stacks
AssigneeSeagate Technology LLC
InventorsSunnie H. N. Lim, Koichi Wago
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Abstract
The embodiments disclose a continuous thin film magnetic layer and a patterned hard mask layer configured to be deposited onto the continuous thin film magnetic layer and to have plural ion implantations, wherein the ion implantations are configured to create chemically and structurally altered localized magnetic regions unprotected by the patterned hard mask layer.
Claims20
A method of fabricating bits in a stack, comprising:
- patterning a hard mask layer;
- using at least one of a plurality of ion implantations with at least one chemical species configured to implant energetic ions that chemically alter localized magnetic regions unprotected by the patterned hard mask layer;
- and
- creating magnetically altered regions of predetermined low saturation moment (Ms) with low thermal conductivity within the stack.
1 more element
An ion implantation structure, comprising:
- a continuous thin film magnetic layer;
- and
- a patterned hard mask layer configured to be deposited onto the continuous thin film magnetic layer and to have plural ion implantations, wherein the ion implantations are configured to create chemically and structurally altered localized magnetic regions unprotected by the patterned hard mask layer.
An apparatus, comprising:
- a device used to determine a voltage, chemical ion selection and dose for ion implantation based on mass and properties of the ion chemical species;
- a device used to determine a depth of an ion implantation of energetic ions that are configured to chemically and structurally alter localized magnetic regions of a pattern masked continuous thin film magnetic layer to create thermally and magnetically isolated single domain magnetic island bits in a stack including in a heat assisted magnetic recording (HAMR) bit patterned media (BPM) stack.
Dependencies are inferred from the claim text.