Micro cold spray direct write systems and methods for printed micro electronics
AssigneeNDSU Research Foundation
InventorsRobert A. Sailer, Justin M. Hoey, Iskander Akhatov, Orven Swenson, Artur Lutfurakhmanov, Michael Robinson
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Abstract
A system and method for depositing an aerosolized powder of solid particles on a substrate for printed circuit applications is disclosed and comprises cold spraying the aerosolized powder onto the substrate to form a finite feature, wherein at least one of the dimensions of length and width of the finite feature measures 500 microns or less.
Claims50
A micro cold spray direct-write system configured for deposition of solid particles on a substrate, comprising:
- a deposition head;
- a carrier gas supply line coupled to an input of the deposition head;
- wherein the carrier gas supply line is configured to carry aerosolized precursor material comprising solid particles;
- and
- an accelerator gas supply line coupled to the deposition head, the accelerator gas supply line configured to carry an accelerator gas to the deposition head;
- wherein the deposition head comprises a nozzle at an output of the deposition head;
- wherein the nozzle has an entrance opening and an exit opening;
- wherein the accelerator gas is configured to drive the carrier gas out of the exit opening of the nozzle as a high velocity aerosol beam such that the solid particles deform as they impact the substrate to generate a finite feature on the substrate.
A micro cold spray direct-write deposition head configured for deposition of solid particles on a substrate, comprising:
- a first input for receiving a carrier gas;
- wherein the carrier gas comprises an aerosolized precursor material comprising solid particles;
- a second input for receiving an accelerator gas;
- and
- a nozzle at an output of the deposition head;
- wherein the nozzle has an entrance opening and an exit opening;
- wherein the accelerator gas is configured to drive the carrier gas out of the exit opening of the nozzle as a high velocity aerosol beam, such that the solid particles deform as they impact the substrate to generate a finite feature on the substrate.
A method for depositing an aerosolized powder of solid metallic particles on a substrate for printed circuit applications, comprising:
- cold spraying the aerosolized powder onto the substrate to form a finite feature;
- wherein at least one of the dimensions of length and width of the finite feature measures 500 microns or less.
Dependencies are inferred from the claim text.