Method of forming pattern
AssigneeKabushiki Kaisha Toshiba
InventorHironobu SATO
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Abstract
According to one embodiment, a method of forming a pattern includes applying a polymer material having a first segment and a second segment in openings formed in a guide, heating the polymer material to achieve microphase separation of the polymer material to form a self-assembled pattern which includes a first polymer portion having a cylindrical shape which includes the first segment, and a second polymer portion including the second segment and surrounding a lateral portion of the first polymer portion, and selectively removing the first polymer portion. A molecular weight ratio of the first segment to the second segment in the polymer material is approximately 4:6.
Claims20
A method of forming a pattern, comprising:
- forming a pattern having openings on a film to be processed;
- depositing a polymer material having a first polymer material and a second polymer material in the openings;
- heating the polymer material to achieve microphase separation of the polymer material to forma first polymer portion having a cylindrical portion from the first polymer material, and a second polymer portion surrounding the cylindrical portion of the first polymer portion from the second polymer material;
- and
- selectively removing the cylindrical portion,
- wherein molecular weights of the first polymer material and the second polymer material have a ratio of about 6:4.
A method of forming a pattern, comprising:
- applying a polymer material having a first segment and a second segment in an opening portion of a guide;
- heating the polymer material to achieve microphase separation of the polymer material to form a self-assembled pattern including a first polymer portion having a cylindrical shape which includes the first segment, and a second polymer portion including the second segment that surrounds a lateral portion of the first polymer portion;
- and
- selectively removing the first polymer portion,
- wherein molecular weights of the first segment and the second segment in the polymer material satisfy the following formula
- 35
- 65
- ≤
- Molecular
-
-
- Weight
-
-
- of
-
-
- First
-
-
- Segment
- Molecular
-
-
- Weight
-
-
- of
-
-
- Second
-
-
- Segment
- ≤
- 45
- 55
Dependencies are inferred from the claim text.