Turbomolecular pump
AssigneeOerlikon Leybold Vacuum GmbH
InventorsChristian Beyer, Holger Dietz, Gerhard Wilhelm Walter
Life of this patent
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Abstract
A turbomolecular pump has a rotor element in a housing. The rotor element is arranged on a rotor shaft. The rotor shaft is supported by two bearing elements in the housing. The bearing element on the high-vacuum side is constructed as a roller bearing. In order to guarantee a pressure in the area of the bearing element that is acceptable for the bearing element constructed as a roller bearing, the bearing element is arranged in a chamber. The chamber is connected via a channel to the pre-vacuum area and sealed relative to the high-vacuum area by a gasket.
Claims12
A turbomolecular pump comprising
- at least one rotor element with a plurality of rotor blades, said element being supported in a housing by means of a rotor element,
- at least one stator element comprising a plurality of stator blades projecting between the rotor blades, and
- at least two bearing elements arranged in end areas of the rotor shaft, wherein at least the bearing element on the high-vacuum side is formed as a roller bearing and is arranged in a chamber that is connected via at least one channel to a pressure area in which a higher pressure prevails than in the high-vacuum area.
Dependencies are inferred from the claim text.