Vacuum Pump
AssigneeEdwards Limited
InventorsIan David Stones, Nigel Paul Schofield, Martin Nicholas Stuart
Life of this patent
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Abstract
A vacuum pump comprises a molecular drag pumping mechanism and a regenerative pumping mechanism. A rotor element of the molecular drag pumping mechanism surrounds rotor elements of the regenerative pumping mechanism.
Claims27
A vacuum pump comprising a molecular drag pumping mechanism and, downstream therefrom, a regenerative pumping mechanism, wherein a rotor element of the molecular drag pumping mechanism surrounds rotor elements of the regenerative pumping mechanism and wherein a common stator forms part of the regenerative pumping mechanism and at least one pumping stage of the molecular drag pumping mechanism.
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13-28. (canceled)
An impeller for a vacuum pump, the impeller comprising a rotor element of a molecular drag pumping mechanism and a plurality of rotor elements of a regenerative pumping mechanism, wherein the rotor element of the molecular drag pumping mechanism surrounds the rotor elements of the regenerative pumping mechanism and the rotor element of the molecular drag pumping mechanism is part of two stages of the molecular drag pumping mechanism.
30-32. (canceled)
39-54. (canceled)
An impeller for a vacuum pump, the impeller machined of a first material to form integrally thereon a rotor element of a turbomolecular pumping stage, a plurality of rotor elements of a regenerative pumping mechanism, and a rotor for receiving a rotor element of a molecular drag pumping mechanism wherein the rotor element of the molecular drag pumping mechanism is formed of a second material different from the first material.
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Dependencies are inferred from the claim text.