Load port module
AssigneeBrooks Automation, Inc.
InventorsDaniel A. Hall, Glenn L. Sindledecker, Matthew W. Coady, Marcello Trolio, Michael Spinazola
Life of this patent
Estimating the term…
Abstract
A substrate loading device having a frame, a cassette support, and a user interface. The frame is connected to a substrate processing apparatus. The frame has a transport opening through which substrates are transported between the device and processing apparatus. The cassette support is connected to the frame for holding at least one substrate holding cassette. The user interface is arranged for inputting information, and is mounted to the frame so that the user interface is integral with the frame.
Claims23
A substrate loading device comprising:
- a frame adapted for connecting the device to a substrate processing apparatus, the frame having a transport opening through which substrates are transported between the device and processing apparatus;
- and
- a substrate transport container support connected to the frame for holding at least one substrate transport container, the substrate transport container support comprising
- a cover covering at least a portion of the substrate transport container support on which portion the at least one substrate transport container is seated, the cover having a resiliently flexible section,
- at least one detector for detecting a presence of the at least one substrate transport container on the substrate transport container support, and
- a member connected to the resiliently flexible section of the cover to move as a unit with the resiliently flexible section, wherein the member cooperates with the at least one detector causing the at least one detector to detect the presence of the at least one substrate transport container on the substrate transport container support.
A substrate loading device comprising:
- a frame adapted for connecting the device to a substrate processing apparatus, the frame having a transport opening through which substrates are transported between the device and processing apparatus;
- and
- a substrate transport container support connected to the frame for holding at least one substrate transport container, the substrate transport container support comprising
- a cover covering at least a portion of the substrate transport container support, on which portion the at least one substrate transport container is seated, and
- at least one detector for detecting when the at least one substrate transport container is on the substrate transport container support,
- wherein the cover is of unitary construction and has a resiliently flexible tab, and wherein the at least one detector comprises a member mounted to the resiliently flexible tab for effecting detection, with the detector, of the at least one substrate transport container on the substrate transport container support.
A substrate loading device comprising:
- a frame adapted for connecting the device to a substrate processing apparatus, the frame having a transport opening through which substrates are transported between the device and processing apparatus;
- and
- a substrate transport container support connected to the frame for holding at least one substrate transport container, the substrate transport container support comprising
- a cover covering at least a portion of the substrate transport container support on which portion the at least one substrate transport container is seated, the cover having a resiliently flexible section, and
- at least one detector configured for detecting a presence of the at least one substrate transport container on the substrate transport container support,
- wherein the resiliently flexible section cooperates with the at least one detector causing the at least one detector to detect the presence of the substrate transport container on the substrate transport container support.
Dependencies are inferred from the claim text.