Ultra-thin sensing device with flat contact surface
AssigneeMei-Yen Lee
InventorLI-KUO CHIU
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AssigneeMei-Yen Lee
InventorLI-KUO CHIU
Estimating the term…
An ultra-thin sensing device with a flat contact surface comprises a package substrate, an interposer structure, a vertical electrical connection structure and a sensing chip. The interposer structure disposed on the package substrate comprises connection pads and second bonding pads electrically connected to the connection pads and first bonding pads of the package substrate. The vertical electrical connection structure disposed on the interposer structure comprises vertical conductors electrically connected to the connection pads. The sensing chip disposed on the vertical electrical connection structure comprises a chip substrate, and sensing members, sensing circuit cells and vertical through electrodes, which are formed on the chip substrate. The sensing member senses specific features of an organism to obtain sensing signals, processed by the sensing circuit cells into biometrics feature signals transmitted to the first bonding pad through the vertical through electrode, the vertical conductor and the second bonding pad.
An ultra-thin sensing device with a flat contact surface, the sensing device comprising:
A method of manufacturing a sensing device, comprising the steps of:
Dependencies are inferred from the claim text.