# US 2014/0369387 A1 · Method for the temperature measurement of substrates in a vacuum chamber

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- Number: US 2014/0369387 A1
- Document ID: US20140369387A1
- Status: Published application
- Kind: A1
- Application number: 14/345,019
- Filed: 2012-09-07
- Published: 2014-12-18
- Earliest claimed: 2011-09-15
- Assignees: Oerlikon Trading AG, Trubbach
- Inventors: Siegfried Krassnitzer; Markus Esselbach
- Web page: https://patentgrep.com/patent/US20140369387A1

## CPC

- G01K 7/10: Arrangements for compensating for auxiliary variables, e.g. length of lead
- G01J 5/0003: {for sensing the radiant heat transfer of samples, e.g. emittance meter}
- G01J 5/0007: {of wafers or semiconductor substrates, e.g. using Rapid Thermal Processing}
- G01J 5/061: by controlling the temperature of the apparatus or parts thereof, e.g. using cooling means or thermostats
- G01J 5/064: {Ambient temperature sensor; Housing temperature sensor; Constructional details thereof}
- G01K 7/04: the object to be measured not forming one of the thermoelectric materials
- G01J 5/80: Calibration (using comparison with reference sources G01J5/52)
- G01J 2005/065: {by shielding}
- G01K: MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR (radiation pyrometry G01J5/00)
- G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N)

## Abstract

The present invention relates to a temperature-measuring system, comprising a temperature sensor and a reference body, wherein means for determining temperature changes of the reference body and/or for control of the temperature of the reference body are provided. When the temperature measuring-system is used in a vacuum, the reference body forms no substantial material thermal bridges to the temperature sensor and the reference body shields the temperature sensor with respect to the environment in such a way that only radiation that comes from the surfaces of the reference and from surfaces of which the temperature is to be determined reaches the surface of the temperature sensor.

## Claims

### Claim 1

Temperature-measuring system, comprising a temperature sensor and a reference body, characterized in that means for determining temperature changes of the reference body and/or for controlling the temperature of the reference body are provided, wherein the reference body, when the temperature-measuring system is used in a vacuum, forms no substantial material thermal bridges to the temperature sensor and the reference body shields the temperature sensor with respect to the environment in such a way that only radiation that comes from the surfaces of the reference and from surfaces of which the temperature is to be determined reaches the surface of the temperature sensor.

### Claim 2 (depends on 1)

Temperature-measuring system according to claim 1, characterized in that the reference body is executed as a cup with a cup bottom and the temperature sensor can be placed near the cup bottom yet in a manner thermally insulated from the latter.

### Claim 3 (depends on 1)

Vacuum treatment facility with a temperature-measuring system according to claim 1, characterized in that the reference is oriented in such a manner that essentially only radiation that comes from the surfaces of the reference and from surfaces of the substrates to be treated in the vacuum facility and possibly from the substrate holders reaches the surface of the temperature sensor.

### Claim 4

Method for measuring the temperature of substrates in a vacuum treatment chamber, comprising the following steps:
determining a first sensor measurement value of a temperature sensor
determining a first reference measurement value of a reference body
determining the substrate temperature by using the sensor measurement value and the temperature measurement value.

### Claim 5 (depends on 4)

Method according to claim 4, characterized in that the sensor measurement value corresponds to the temperature of the sensor and the reference measurement value corresponds to the actual temperature of the reference body and the repeated approximation of the temperature of the reference body to the temperature of the sensor results in that, at a stable temperature, the temperature of the reference body is stable and equal to the temperature of the sensor and thus the sensor, the reference body and the substrates have the same temperature.