Back to results
US 2014/0369382 A1Published application
Thermal type photodetector, thermal type photodetector device, electronic instrument, and method of manufacturing thermal type photodetecgtor
AssigneeSeiko Epson Corporation
InventorTakafumi NODA
Life of this patent
Estimating the term…
Abstract
A thermal detector includes a substrate, a thermal detector element, a support member, a support post and an auxiliary support post. The support member supports the thermal detector element. The support post is disposed between the substrate and the support member so that a cavity is disposed between the substrate and the support member. The auxiliary support post is disposed between the substrate and the support member. A gap is disposed between the auxiliary support post and the support member.
Claims5
A thermal detector comprising:
- a substrate;
- a thermal detector element;
- a support member supporting the thermal detector element;
- a support post disposed between the substrate and the support member so that a cavity is disposed between the substrate and the support member;
- and
- an auxiliary support post disposed between the substrate and the support member,
- a gap being disposed between the auxiliary support post and the support member.
4 more elements
Dependencies are inferred from the claim text.